Comet Synertia RF - Water-Cooled Synertia RF Generator; Figure 40: Front View and Rear View of the Water-Cooled Synertia RF Generator; Figure 41: Left Side View of the Water-Cooled Synertia RF Generator; Figure 42: Top View of the Water-Cooled Synertia RF Generator

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User Manual Synertia® RF Generator 73

The information contained in this manual is subject to change by Comet Yxlon without prior notice.

8.2.2 Water-cooled Synertia® RF generator:

Figure 40: Front view and rear view of the water-cooled Synertia® RF generator

Figure 41: Left side view of the water-cooled Synertia® RF generator

Figure 42: Top view of the water-cooled Synertia® RF generator

Main Page

Document Information2
Table of Contents3
Safety14
General Safety14
Scope of this Document14
Layout Conventions in this Document15
Abbreviations and Special Terms16
Table 1: Abbreviations16
Table 2: Special Terms16
Scope of the Product17
Intended Use17
Improper Use17
Authorized Users18
Compliance with Standards and Directives18
Table 3: SEMI Standards18
List of Figures19
Table 4: EU/EN Standards and Directives19
Hazards20
High Voltage Hazards20
List of Tables21
Radio Frequency Hazards21
Hot Surface Hazards22
Heavy Weight Hazards22
List of Safety Notes23
Hazard Label Locations23
Figure 1: Hazard Label on Air-Cooled Generator (Warning Sticker)23
Figure 2: Hazard Label on Water-Cooled Generator (Warning Sticker)23
Personal Safety24
Precautions for Safe Installation and Operation24
Table 5: Values of External Circuit Breaker25
Precautions When Performing Troubleshooting, Repair or Maintenance26
Emergency Procedures27
Interlock Circuit28
Figure 3: Interlock Circuit Diagram28
Figure 4: RF Output Connector with Switch Plate on the Back of Air-Cooled Generator29
Lockout and Tagout the RF Generator30
General30
Shut down Air-Cooled Model30
Shut down Water-Cooled Model31
Restart31
Equipment Safety32
Responsibility of the Operator32
Limiting Conditions32
Table 6: Limiting Conditions32
Disposal33
Overview34
General Information34
If You Need Help34
Manufacturer Information34
Disclaimer and Limitation of Liability34
Trademarks35
Customer Feedback35
Table 7: List of Trademarks Used in this Manual35
Product Overview36
Product Description36
Figure 5: Air-Cooled Synertia® RF Generator36
Figure 6: Water-Cooled Synertia® RF Generator36
Components on the Front Panel37
Figure 7: Front Panel of Air-Cooled Synertia® RF Generator37
Figure 8: Front Panel of Water-Cooled Synertia® RF Generator37
Table 8: Components on the Front Panels of Air-Cooled and Water-Cooled Generators38
Components on the Back Panel39
Figure 9: Back Panel of Air-Cooled Synertia® RF Generator39
Table 9: Components on the Back Panel of the Air-Cooled Generator39
Figure 10: Back Panel of Water-Cooled Synertia® RF Generator40
Table 10: Components on the Back Panel of the Water-Cooled Generator40
Figure 11: Interfaces on the Back of Air- and Water-Cooled Synertia® RF Generators41
Table 11: Interfaces on the Backs of Air- and Water-Cooled Generators - Mainboard41
Table 12: Interfaces on the Backs of Air- and Water-Cooled Generators - Sync Layer42
Table 13: Interfaces on the Backs of Air- and Water-Cooled Generators - Fieldbus Layer42
Control Modes43
Required Supplies43
Self-Protection of the Product43
Theory of Operation45
Figure 12: Synertia® RF Generator Block Diagram45
Table 14: Description of Functional Blocks of the Generator46
Pre-Installation47
Lifting of the Unit47
Unpacking the Unit48
Unit Weight and Center of Mass48
Packaging48
Table 15: Center of Mass48
Unpacking49
Figure 13: Packaged Air-Cooled and Water-Cooled Generators49
Lighting50
Visual Inspection50
Accessories Shipped with the Product50
Figure 14: Embedded Air-Cooled and Water-Cooled Generators50
Mounting51
Figure 15: Seismic Anchorage Zones Air-Cooled Model51
Figure 16: Seismic Anchorage Zones Water-Cooled Model51
Installation and Connection52
Sequence of Installation52
Connecting Ground for Equipotential Bonding53
Figure 17: Ground Connector Air-Cooled Unit53
Figure 18: Ground Connector Water-Cooled Unit53
Figure 19: Parts for the Ground Connection54
Figure 20: Ground Connection Air-Cooled Unit54
Figure 21: Ground Connection Water-Cooled Unit54
Connecting RF Generator Interlock to System55
Figure 22: Rear Interfaces with Focus on Interlock Connectors55
Connecting Applicable Interfaces56
CEX Operation56
Figure 23: Interfaces on the Back of the Generator56
Figure 24: CEX Initiator-Receiver Configuration56
ARC-Sync Operation57
Sync Bus Operation57
Pulse Operation58
Connecting RF Power Cable59
Figure 25: RF out Connector with Non-Depressed Switch Plate (Air- and Water-Cooled Generator)59
Figure 26: Securely Tightened RF out Connector (Air- and Water-Cooled Generator)60
Connecting/Disconnecting Cooling Water Connections (Only Water-Cooled Generators)61
Connecting Cooling Water Connections61
Figure 27: Water out and Water in Connections in the Lower Right Corner on the Back of the Water-Cooled Generator61
Figure 28: Fitting with Teflon® Sealing Tape62
Figure 29 Attachment of Hose63
Figure 30 Water out and Water in Properly Connected63
Table 16: Values of Cooling Water63
Optional: Using a Solenoid Valve64
Disconnecting Cooling Water Connections64
Connecting AC Mains65
Connector Air-Cooled Generators65
Table 17: Pin-Out Han Q Connector65
Connector Water-Cooled Generators66
Table 18: Pin-Out Han C Connector66
Connection Procedure for Air-Cooled and Water-Cooled Units67
Figure 31: Wiring of Mains Connector Air-Cooled Unit67
Figure 32: Wiring of Mains Connector Water-Cooled Unit67
Figure 33: Mains Connector Air-Cooled Unit67
Figure 34: Mains Connector Water-Cooled Unit67
Unit Uninstallation69
Disposal of Packaging Material69
Operation70
Modes of Operation70
Remote-Control Operation Via the Analog and Digital Signals70
Remote-Control Operation Via Digital Communications Interface70
Using the Synertia® RF Generator71
Commissioning the Synertia® RF Generator71
Displaying Alarms and Warnings Via Leds72
Figure 35: Leds on the Front Panel of Air- and Water-Cooled Synertia® RF Generators72
Table 19: Operating Status73
Troubleshooting74
Repair of RF Generators74
General Instructions74
Administrative Procedures74
Authorized Repair Locations75
Shipment of RMA Units75
Failure Analysis of Returned Units75
Claims of Shipping or Handling Damage76
Repair76
Troubleshooting Guide77
General Troubleshooting77
Checks with the Power off77
Checks with the Power on78
Warning and Alarm Messages79
Difference between Warning and Alarm Messages79
ID of Warning or Alarm Messages79
Warranty and Maintenance80
Warranty Statement and Terms80
Periodic Checking of the Safety Interlock System81
Maintenance81
Calibration81
Cleaning82
Mechanical Specifications83
Spacing and Airflow Requirements83
Dimensional Drawings83
Air-Cooled Synertia® RF Generator84
Figure 36: Front View and Rear View of the Air-Cooled Synertia® RF Generator84
Figure 37: Left Side View of the Air-Cooled Synertia® RF Generator84
Figure 38: Top View of the Air-Cooled Synertia® RF Generator84
Figure 39: Right Side View of the Air-Cooled Synertia® RF Generator85
Water-Cooled Synertia® RF Generator86
Figure 40: Front View and Rear View of the Water-Cooled Synertia® RF Generator86
Figure 41: Left Side View of the Water-Cooled Synertia® RF Generator86
Figure 42: Top View of the Water-Cooled Synertia® RF Generator86
Figure 43: Right Side View of the Water-Cooled Synertia® RF Generator87
Interface Specifications88
Example of Interface Configuration88
Figure 44: Interface Configuration88
User Port - 15-Pin Analog/Digital Interface (Optional)89
Signals on the 15-Pin Analog/Digital User Port89
Table 20: 15-Pin User Port - Configuration91
Table 21: 15-Pin User Port - Signal Specifications92
Schematics for 15-Pin User Port93
Figure 45: Analog Input93
Figure 46: Analog Output93
Figure 47: Digital Input93
Figure 48: Digital Output93
Figure 49: Interlock94
Figure 50: Serial Interface RS-23294
CEX Interface95
DC-Supply Interface97
Signals on the 5-Pin M8 DC-Supply Connector97
Figure 51: DC-Supply Connector97
Table 22: 5-Pin M8 DC-Supply - Configuration97
Schematics for 5-Pin DC-Supply98
Interlock Interface98
Signals on the 3-Pin M8 Interlock Connector98
Figure 52: Interlock Connector98
Table 23: DC-Supply98
Schematics for 3-Pin Interlock99
Figure 53: Interlock99
Table 24: 3-Pin M8 Interlock - Configuration99
Pulse Interface100
Host Port Communication101
Host Port Communication Via SHFT Protocol101
Understanding the SHFT Protocol101
SHFT Protocol - Request101
Table 25: Structure of a Request102
SHFT Protocol - Response103
Response to a Read Command103
Table 26: Structure of a Response to a Read Command103
Response to a Write Command104
Response to an Invalid Request104
Table 27: Structure of a Response to an Invalid Request104
Table 28: Exception Function Codes105
Table 29: Exception Codes106
SHFT Protocol - Communication Examples107
Table 30: Example 1 - Structure of the Request107
Table 31: Example 1 - Structure of the Response107
Table 32: Example 2 - Structure of the Request108
Table 33: Example 2 - Structure of the Response108
Table 34: Example 3 - Structure of the Request109
Table 35: Example 3 - Structure of the Response109
Host Port Communication Via RS-232110
Default Communication Parameters110
Data Exchange Via RS-232110
Table 36: Structure of a Request Via RS-232 with CRC16 Checksum111
Table 37: Structure of a Response to a Read Command Via RS-232111
Calculation of the CRC16 Checksum112
Table 38: Structure of a Response to a Write Command Via RS-232112
Table 39: Structure of a Response to an Invalid Request Via RS-232112
Sample Implementation of the CRC16 Checksum113
Communication Examples114
Table 40: Example 1 - Write Set-Point - Request114
Table 41: Example 1 - Write Set-Point - Response114
Table 42: Example 2 - Read Set-Point - Request114
Table 43: Example 2 - Read Set-Point - Response114
Table 44: Example 3 - Write Set-Point - Request115
Table 45: Example 3 - Write Set-Point - Response115
Table 46: Example 4 - Read Status - Request115
Table 47: Example 4 - Read Status - Response115
List of Parameters116
Table 48: Colors Used in the Parameter Table116
Table 49: Parameters122
Reading Warning and Error Messages123
Reference Documents124

Comet Synertia RF - Water-Cooled Synertia RF Generator; Figure 40: Front View and Rear View of the Water-Cooled Synertia RF Generator; Figure 41: Left Side View of the Water-Cooled Synertia RF Generator; Figure 42: Top View of the Water-Cooled Synertia RF Generator

Table of Contents