Comet Synertia RF - Product Overview; Product Description; Figure 5: Air-Cooled Synertia RF Generator; Figure 6: Water-Cooled Synertia RF Generator

User Manual Synertia® RF Generator 23
The information contained in this manual is subject to change by Comet Yxlon without prior notice.
2.2 Product overview
2.2.1 Product description
The Synertia® RF generator is an adjustable source of radio frequency power into a 50 Ω
load.
It is operated via the customer's system control for remote operation.
The Synertia® RF generator is a high efficiency power generator for radio frequency (RF)
and is designed as an energy source for plasma excitation.
Comet's portfolio of RF power generator is designed to deliver the power required for a
broad range of plasma processing applications. The generator's output frequency
(specified at the time of order) is adjustable within a frequency range. It provides high
accuracy in either forward power, load power or external setpoint regulation mode.
The platform offers a wide range of features enabling the user to optimize its
performance for even the most challenging plasma control applications.
This RF generator employs latest technology in a compact 19 in half rack design.
Figure 5: Air-cooled Synertia® RF generator Figure 6: Water-cooled Synertia® RF generator