82 User Manual Synertia® RF Generator
The information contained in this manual is subject to change by Comet Yxlon without prior notice.
9.3 CEX interface
The CEX input/output interface for CEX operation is a standard feature on all models.
CEX means “Common Exciter“. The respective connectors are located on the back of the
generator.
This feature allows you to connect and synchronize a Synertia® RF generator with other
generators so that all generators produce RF output signals with the same frequency and
a fixed phase relationship. This is necessary, for example, when two or more generators
are operating in the same plasma to avoid beat frequencies between generators
operating at similar frequencies.
You can configure the generator as a initiator or a receiver via the wiring of its CEX input
or output.
• CEX initiator: the “CEX Out” socket is connected. In this configuration, the
Synertia® RF generator delivers the CEX signal to one or several receivers. The
receivers are phase-locked to the initiator signal and operate at the same
frequency.
• CEX receiver: the “CEX In” socket is connected. In this configuration, the
Synertia® RF generator follows the signal of any initiator in frequency and phase.
You can operate several Synertia® RF generators in daisy chain, which means that you
have to connect both sockets (“CEX In” and “CEX Out”) to other generators. The result is
that this generator on the one hand acts as a receiver of a first initiator in this chain and
at the same time as the initiator of the next receiver in this chain.
In some applications it is necessary to have a specific phase relation between several
RF generators. Therefore, you can adjust the phase relation between the CEX input signal
and the RF output signal of any Synertia® RF generator in the range of 0° to 360° by
issuing a command via any digital interface. This adjustable parameter can also be used
to compensate for different coaxial cable lengths between the CEX connectors or
between the RF output connector and the plasma load.
To activate and deactivate the CEX feature and to set the corresponding parameters, use
the associated commands via any digital interface of the Synertia® RF generator. All
settings should only be applied in relation to the physically realized chain architecture.
Use suitable high-quality, double-shielded coaxial cables to connect the CEX input/output.
Make sure that the connections between cables and connectors are tight. The cables are
not provided by Comet.
Phase offsets of the RF and CEX output signals are related to CEX input signal. If the
output frequency of the CEX or RF signal is different from the input signal, phase offset
values are irrelevant.
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