58 User Manual Synertia® RF Generator
The information contained in this manual is subject to change by Comet Yxlon without prior notice.
5.2 Using the Synertia® RF generator
5.2.1 Commissioning the Synertia® RF generator
Since the Synertia® RF generator does not provide any controls for adjusting the internal
parameters, the unit must be commissioned with any external host connected to one of
the communication interfaces available on the back panel (RS-232 interface or one of the
fieldbus interfaces).
The configuration possibilities depend on the communication interface used.
As soon as the Synertia® RF generator is started and connected to the host, you can
configure the unit. To do so, proceed as follows.
Edit the available parameters over the selected communication interface as required. For
detailed information on the available commands, please refer to chapter 10 "Host port
communication" on page 88.
Note: make sure that the generator and the matching network work together properly.
To activate or deactivate CEX operation or to set the corresponding parameters,
use the associated commands via any digital interface of the
Synertia® RF generator. See
10 “Host Port communication”.
All settings should only be applied in relation to the physically realized chain
architecture.
To activate or deactivate pulse operation or to set the corresponding parameters,
use the associated commands via any digital interface of the
Synertia® RF generator. See
10 “Host Port communication”.
All settings should only be applied in relation to the physically realized chain
architecture.
If the RF does not successfully ignite the plasma, check the generator for errors. In
the event of an error, this is indicated via the LEDs on the front and back.
See section
5.2.2."
Displaying alarms and warnings via LEDs" on page 59.
Detailed error information can be retrieved via the communication interface by
using the corresponding commands
See sections
0 “List of parameters” and 10.4 “Reading warning and error
messages”.
When configuration is done, the settings are stored in the unit and recalled the
next time the unit is switched on.