User Manual Synertia® RF Generator 13
The information contained in this manual is subject to change by Comet Yxlon without prior notice.
1.4.2 Precautions when performing troubleshooting, repair or
maintenance
NOTICE
There are no user or operator serviceable parts inside the
Synertia® RF generator.
• As user or operator, do not attempt any repair! Only
carry out troubleshooting, repair or maintenance on this
equipment if you are properly trained and qualified by
Comet Yxlon.
• Do not remove any protective metallic housing for any
reason!
• Please contact Comet Yxlon's technical support for
assistance in case of any defect.
Breaking the tamper seal of the RF generator will void the
warranty.
Safety note 9: Notice - repair
• Prior to performing maintenance, repair or any service operation on the
RF delivery system (RF generator, matching network, and/or RF input of the
plasma chamber), lockout and tagout the RF generator to prevent powering up
the unit by accident. Otherwise, there is a risk of electric shock or burns.
For details see 1.5 “Lockout and tagout the RF generator” on page 17.
• Do not touch any open connections in the entire system.
• Prior to cleaning, switch off the mains supply. Use a mild cleaning agent with a
moist cloth for cleaning. Never clean dripping wet.
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