Comet Synertia RF - Authorized Users; Compliance with Standards and Directives; Table 3: SEMI Standards

User Manual Synertia® RF Generator 5
The information contained in this manual is subject to change by Comet Yxlon without prior notice.
1.2.3 Authorized users
Installing, operating, replacing or troubleshooting this product as well as connecting it to
or disconnecting it from a power source must always be performed by trained and
qualified personnel.
Qualified personnel are persons specifically trained in RF power equipment to install,
operate, service, or maintain equipment of the type and hazard potential of this unit.
1.2.4 Compliance with standards and directives
The product complies with the following standards and requirements of the SEMI
standards and the European Directives:
NOTICE
The generator must be installed as described in this user manual.
If this equipment is expanded, modified, or installed into a larger system, the operator is
responsible to guarantee the compliance of the overall system.
If this equipment is used with external components, the operator must ensure that the
Safety and EMC requirements are not violated.
Safety note 1: Notice - compliance
SEMI - Reference Number
Title
SEMI F47 Specifications for Semiconductor Processing Equipment Voltage Sag
Immunity
SEMI S2 Environmental, Health and Safety Guidelines for Semiconductor
Manufacturing Equipment
SEMI S8 Ergonomics Assessment – included in the SEMI S2 evaluation
SEMI S14 Fire Assessment – included in the SEMI S2 evaluation
SEMI S22 Safety Guideline for the Electrical Design of Semiconductor Manufacturing
Equipment
Table 3: SEMI standards