Comet Synertia RF - Scope of the Product; Intended Use; Improper Use

4 User Manual Synertia® RF Generator
The information contained in this manual is subject to change by Comet Yxlon without prior notice.
1.2 Scope of the product
1.2.1 Intended use
The Synertia® RF generator is a high efficiency power generator for radio frequency (RF)
and is designed as an energy source for plasma excitation.
Comet's portfolio of RF power generators is designed to deliver the power and advanced
control required for a broad range of plasma processing applications.
Applications include material removal processes including conductor etch, dielectric etch,
atomic layer etch, reactive ion etching, bevel etch, dry strip, and others; material
deposition processes including plasma-enhanced chemical vapor deposition, atomic layer
deposition, sputtering, ion implantation, and a broad range of other processes. Markets
include semiconductor, flat panel, solar PV and numerous thin films, material and surface
modification/processing applications.
1.2.2 Improper use
The Synertia® RF generator must only be employed within the frame of its intended use.
Not allowed are, for example:
• opening the enclosure of the product,
• performing any work on the product which exceeds the activities described in this
user manual,
• modification and manipulation of the product,
• use of the product for medical purposes,
• use of the product for radio and telecommunication purposes,
• use of the product in environments with explosive atmosphere.
The above list contains only examples and is not complete.