User Manual Synertia® RF Generator 77
The information contained in this manual is subject to change by Comet Yxlon without prior notice.
Power Control Mode
(Forward o
r Load
The signal on this digital input selects power
control mode. A transition from low to high state
will enable
load power
mode, a transition from high
to low state will enable forward power regulation
mode.
(See also pin 1.)
This is the RS-232 receive signal.
Out
V Supply for the interlock loop ending at pin 15.
mA.
The signal provided to this analog input is used as
process control feedback input, where the
process
control set point is given by pin 1. The scaling for
Process Control Setpoint (pin 1) and Process
Control Feedback (pin 9) has to be chosen so that
the resulting values are identical.
This signal closes the control loop around external
components i
n the RF path. Typically, matching
networks provide a scaled DC
bias or RF peak
voltage monitor signal which is applied to this pin.
When set to process control mode, the generator
compares the value for process control set point
with process control feedb
ack and adjusts the
output power to maintain both values at the
V to 10 V. 0 V to 10
V correlates to 0
to maximum process control value which depends
on the feedback source.
The signal on this analog output provides a linear
readback of the RF power. The source of the signal
depends on the power control mode.
In forward power control mode, it provides the
forward power.
In load power control mode, the load power.
s 0 V to 10 V. 0 V to 10 V correlates to
W to nominal RF power.
V correlates to 50 % of the nominal
power (see type label for actual rating).
For operation, this return must be grounded either
on
host or client side.
An error on this digital output indicates
overtemperature.