Edwards STP-iXA4507 Series - Page 108

STP-iXA4507 series Turbomolecular Pump
MT-91E-001-0
Page 98
SERIAL COMMUNICATION PROTOCOL
PAG
E
98
5
Bit
Warning message
16-bits hex value
0
[System reservation]
0001
1
WARNING: Second Damage Limit
0002
2
WARNING: First Damage Limit
0004
3
WARNING: Imbalance X_H
0008
4
WARNING: Imbalance X_B
0010
5
WARNING: Imbalance Z
0020
6
WARNING: Pump Run Time Over
0040
7
WARNING: Pump Overload
0080
8
[System reservation]
0100
9
[System reservation]
0200
10
[System reservation]
0400
11
[System reservation]
0800
12
[System reservation]
1000
13
[System reservation]
2000
14
WARNING: Other Warning
*1
4000
15
[System reservation]
8000
*1 FAN Warning, C/U Restart, FAN Lifetime Over, RTMP Higher or RTMP Lost.
Table 28 - Warning value bit assign