Edwards STP-iXA4507 Series User Manual

STP-iXA4507 series Turbomolecular Pump
MT-91E-001-0
Page 99
SERIAL COMMUNICATION PROTOCOL
5
Example:
Pump operation mode: 01
hex
= 1 = Levitation
WARNING being detected: 000C
hex
= 0004
hex
OR 0080
hex
=
"WARNING: First Damage Limit" and "WARNING: Imbalance X_H"
The number of errors: 02
hex
= 2 errors
Error 1: 0D
hex
= 13 = Disturbance Xh
Error 2: 0F
hex
= 15 = Disturbance Xb
Error 3 to 79: 00
hex
= No error detected
Parameter
1
2
3
4
5
6
7
8
9
10
ASCII
0
1
0
0
0
C
0
2
0
D
0
F
0
0
0
0
0
0
0
0
0
0
HEX
30
31
30
30
30
43
30
32
30
44
30
46
30
30
30
30
30
30
30
30
30
30
Parameter
11
12
13
14
15
[Omitted]
70
71
72
73
74
ASCII
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
HEX
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
Parameter
75
76
77
78
79
80
81
82
ASCII
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
HEX
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30

Edwards STP-iXA4507 Series Specifications

General

Brand	Edwards
Model	STP-iXA4507 Series
Category	Water Pump
Language	English