Edwards STP-iXA4507 Series User Manual

STP-iXA4507 series Turbomolecular Pump
MT-91E-001-0
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ILLUSTRATIONS
Figure Title Page
1 Warning label of STP pump installation and Caution label
for Heavy product 5
2 Caution label of Heater removing prohibition and
Warning label for hot surface 6
3 Caution label for the high voltage devices 6
4 Label for the rotational direction 6
5 Notice label urging to use water-cooling 7
6 Label related to connecting the water-cooling lines 7
7 Warning label of urging overhaul the pump 7
8 Cross sectional view of the STP pump 8
9 External appearance of STP-iXA4507 series 19
10 Label affixing positions 20
11 Space around the STP pump* 23
12 Example of lifting the STP pump 25
13 Jacking up the STP pump 26
14 Control unit bottom face 27
15 Configuration of the STP pump 28
16 Control unit (Front panel) 29
17 Installation of the STP pump to the vacuum equipment 31
18 STP pump installation positions 33
19 Positions of the outlet port on the horizontally
or slanted installed STP pump (view from bottom) 33
20 Methods of securing the STP pump 36
21 Screw holes for securing the control unit base 37
22 Power cable (straight type connector) 38
23 Connecting method of the power cable 39
24 Connecting the purge port 42
25 Positions of the cooling water port 43
26 Baking heater installation position 44
27 Configuration of the STP pump with the TMS 47
28 TMS valve connection 48
29 Example of cable installation in metallic duct 54
30 The flash patterns of STATUS 57
31 Serial port 61
32 X2 connector (D-Sub 9pin) 62
33 RS485 connections 63
34 Grounding example (Both ends grounding) 66
35 Grounding example (single-point grounding) 66
36 Example of ring ferrite core installation 67
37 Example of cable installation in metallic duct 67
38 Example of a differential signal waveform 68
39 PC to SIM communication 69
40 Block diagram of communication process example 78
41 Example of answer resending process 79
42 Example of response when the command is sent continuously 79
43 Example of command sending during answer data reply 79
44 Example of the communication cycle process 80
45 Example of the command sending process 81
46 Example of the answer receiving process 81

Edwards STP-iXA4507 Series Specifications

General

Brand	Edwards
Model	STP-iXA4507 Series
Category	Water Pump
Language	English