Chapter 10: Cleanroom Robots
The eCobra robots are available in Class 10 Cleanroom models.
This option is a factory-installed configuration. Changes to the robot include the addition of a
bellows assembly mounted at the Joint 3 quill, fully sealed access covers, and a two-stage
vacuum system to evacuate the arm. This vacuum system incorporates a compressed air
vacuum generator mounted in the base of the robot to provide a high vacuum in the outer link
and bellows area. An additional high flow rate vacuum source is required to evacuate in the
inner link and base.
Figure 10-1. eCobra 600 Cleanroom Robot
Cleanroom Specifications
Table 10-1. eCobra Cleanroom Robot Specifications
Robot Performance Specification See Robot Specifications on page 166.
Ambient Temperature Specification
5 to 35° C (41 to 95° F)
14402-000 Rev. F eCobra User's Guide 189
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