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Environmental Agency Producers Registration Number for WEEE: WEE/AE0116XU
Page 11 of 13
QCF89 issue 8
09/11/07
Gas 1 Gas 7
Gas 2 Gas 8
Gas 3 Gas 9
Gas 4 Gas 10
Gas 5 Gas 11
in the gas pod is connected, available for process and that
the gas line has been leak checked.
Please record the leak rate for each gas line. If there is no
line fitted please enter N/A.
Process gas inlet pressure should be set at 3 Bar (45psig).
Minimum acceptable inlet pressure: 2 Bar (30psig).
Maximum acceptable inlet pressure: 5 Bar (75psig).
If the gas line is to be used for BCl3, SiCl4 or TEOS, has the
gas line been wrapped with trace heater wire and insulated?
Failure to do so could result in condensation of the gas,
within the line during processing.
Gas 6 Gas 12
Yes No Detail
15. Have the rotary pump exhaust lines been connected to an
exhaust extraction system that meets all local safety
standards?
16. If the system is fitted with a cryo pump, which is used
for toxic gasses, has an action plan been discussed and
implemented for connection of the pump outlet connector?
17. Has the rotary pump purge been connected to the pumps
and nitrogen supply?
18. Have the rotary pumps been filled with oil of the correct
type for the pump in use?
19. Is the gas pod extraction connected with a minimum flow
rate of 1m3/hour (6 line gas pod) or 3 m3/hour (12 line gas
pod). Does the extraction system meet all local safety
regulations?
20. Do you believe that that demonstration of process has
been included in the purchase of your tool?
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