OpAL Oxford Instruments Plasma Technology Installation Data
The int
erlock chain details are given in the following table: Refer to drawing SE00A26865
(PC2003 interface schematic).
INTERLOCK DEVICE PCB
input
PCB1
LED
Link out Comments
Vacuum
Switch
Vacuum Switch BLK17 11 NONE Pressure below 600 mBar
Hoist /Lid a) Air cylinder
switch/microswitc
h
or
b) Guardmaster
Switch N/O Switch
BLK18
BLK19
12
13
NONE Lid closed or hoist down. Enables
end point laser via JP51
Primary
pump
running
Current monitor in
Power Box
JP44 6 15 Interlock disabled if an
independent/dry pump fitted
Process
pressure
gauge on
scale
Capacitance
Manometer (e.g.
Baratron™)
JP16 5 NONE Analogue input below 11.5V.
Switches comparator U5.
Spare
interlock 1
External Voltage Free
contact or 24V DC
input to PCB
JP52 14 Can be
bypassed
using
LK19
Customer-supplied device. Volt
free contact JP52 pins 1 and 4.
OR
24V DC input JP52 pin 4.
Spare
interlock 2
Or
Load lock
valve
External Voltage Free
contact
Inter-chamber valve
must be shut
JP53 15 20 Customer-supplied device
Or
Used on 100 and 133 systems
Process
pump purge
Gas Flow Switch at
Primary Pump
JP55 16 LK21A Fit LK21B if fitted
If the above is satisfied, then 24V is at BLK20, 21 & 22 pin 1. This enables the Gas Pod.
Installation Data
Issue 3: October 08 Page 20 of 22 Printed: 7-Aug-09, 8:03
To Next Page
