OIPT Systems Oxford Instruments Plasma Technology System Manual
adjacent
to the machine. A suitable unit is supplied by SMC (part No. AC 2030); other
units to the same specification can be used. Maximum safe pressure in the customer's
feed to the regulator is determined by the regulator used (9.9 bar (148.5 psig) for the
SMC unit).
The supply to the system must be monitored by a pressure gauge having a range of 0 to
10 bar (0 to 150 psi). The pressure regulator must be fitted with a stop to prevent a
pressure greater than 6 bar from being supplied to the system. The pressure to be used
will be set during commissioning of the system.
The following air filter/mist separator/pressure regulator unit components are
recommended:
Air filter: SMC AF2000-02D with filter element 1129116A.
Mist separator: SMC AFD2000-02D with filter element 63092. This filter
element must be changed annually. Note that as this item is
not supplied by OIPT, its maintenance is not included in the
system manuals.
Regulator with gauge: SMC AR2001-02G.
Spacers: 2 off SMC Y20L.
FILTER
MIST
SEPARATOR
ADJUSTABLE
PRESSURE
REGULATOR
DRY AND CLEAN
AIR SUPPLY
MINIMUM PRESSURE
6 BAR (90 PSIG)
PRESSURE
GAUGE
0 TO 10 BAR
(0 TO 150 PSIG)
SMC COMPONENTS
OR EQUIVALENT
COMPRESSED
AIR SUPPLY TO
PLASMALAB OR
IONFAB SYSTEM
(SEE SPECIFICATION)
6 MM
PUSH-FIT
CONNECTOR
Fig 4.1: Recommended compressed air supply installation
Services Specifications
Issue 21: January 10 Page 12 of 22 Printed: 6-Jan-10, 8:53
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