Plasmalab and Ionfab Oxford Instruments Plasma Technology Health and Safety
Health and Safety
Issue 18: April 2010 Page 1-14 of 24 Printed:06 April 2010, 09:32
Note that all PFPE material, including spillages of fresh fluid must be disposed of with
.4.8.5
Maintenance work inside the vacuum chamber, particularly cleaning operations, can
pment to avoid dust
contacting the skin, eyes and other parts of the body. Take appropriate precautions to
.4.8.6 Some processes may generate nanoparticles; particles whose sizes range from 1 to
1.4.8.7
1.4.8.8 Recirculating chillers using silicone oil as a heat transfer fluid and operating at
temperatures above ambient temperature may produce vapour around the chiller bath.
Appropriate extraction should be considered to prevent inhalation of the vapour by
personnel.
1.4.8.9 Do not use silicone oil (such as Thermal H5S) as the heat transfer medium in
heater/chiller units that connect to electrically heated tables. Over-heating silicone oil
can produce hazardous by-products. A glycol based heat transfer medium (such as
Thermal G) should be used in heater/chiller units connected to electrically heated tables.
great care and must be kept well away from fire, from cigarettes and other smoking
materials.
1
generate dust. This dust may be toxic, corrosive or carcinogenic, depending on the
process that is being run. Wear appropriate personal protective equi
contain any dust that may be generated to prevent it spreading.
1
100 nm. The effect of these particles on the health and safety of personnel and the
environment is currently unknown. Follow local and national safety procedures to
alleviate any risk.
If a new process is considered and unfamiliar materials may result, please consult
Oxford Instruments Plasma Technology for further health and safety information.
Gases exhausted from rotary vacuum pumps may contain oil vapour which is
carcinogenic. Always fit a suitable oil mist filter to the exhaust ports of such pumps.
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