Oxford Instruments OpAL - Page 63

System Manual Oxford Instruments Plasma Technology OpAL
Water flow switch
Pumping
pipework
VA C stat
Purge and
Bubbler MFC
N2 vent valve
Hoist
Gate Valve
Lower electrode
support flange
Water delivery
ALD valves
heater jacket
ALD valve
Internal CAN module
Fig 3-5: Console rear view (part)
PLC Interface PLC
Power box
Pumping port
Extraction
port
Purge and bubbler
MFC's
Water pot
Water vapour delivery
ALD valves
heated
Hoist
Gate valve
Fig 3-6: Console left-hand side view
Description
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