Oxford Instruments OpAL - Page 78

OpAL Oxford Instruments Plasma Technology System Manual
I
NTERLOCK DEVICE PCB
input
PCB1
LED
Link out Comments
Vacuum
Switch
Vacuum Switch BLK17 11 NONE Pressure below 600 mBar
Hoist /Lid a) Air cylinder
switch/microswitc
h
or
b) Guardmaster
Switch N/O Switch
BLK18
BLK19
12
13
NONE Lid closed or hoist down. Enables
end point laser via JP51
Primary
pump
running
Current monitor in
Power Box
JP44 6 15 Interlock disabled if an
independent/dry pump fitted
Process
pressure
gauge on
scale
Capacitance
Manometer (e.g.
Baratron™)
JP16 5 NONE Analogue input below 11.5V.
Switches comparator U5.
Spare
interlock 1
External Voltage Free
contact or 24V DC
input to PCB
JP52 14 Can be
bypassed
using
LK19
Customer-supplied device. Volt
free contact JP52 pins 1 and 4.
OR
24V DC input JP52 pin 4.
Spare
interlock 2
Or
Load lock
valve
External Voltage Free
contact
Inter-chamber valve
must be shut
JP53 15 20 Customer-supplied device
Or
Used on 100 and 133 systems
Process
pump purge
Gas Flow Switch at
Primary Pump
JP55 16 LK21A Fit LK21B if fitted
Table 3-2: RF enable interlock chain details
If above satisfied, then 24V is at BLK20, 21 & 22 pin 1. This enables the K4 contactor to
supply power to the RF Generator.
Description
Issue 1: August 07 Page 3-22 of 46 Printed: 07 August 2009 07:42