Oxford Instruments OpAL - Page 83

System Manual Oxford Instruments Plasma Technology OpAL
Top electrode
(ICP 65)
Automatic Matching
Unit (AMU)
Heater jacket
for fast gate
valve
Fast gate
valve
Centering
ring
O ring
O ring
O ring
Adapter
flange
Plasma head
liner
Process gas
line
Clamping
components
Purge gas
line
Blank view port
components
Blank view
port
Process
chamber
top
Fig 3-23: Upper chamber configuration for plasma ALD
Description
Printed: 07 August 2009 07:42 Page 3-27 of 46 Issue 1: August 07