Oxford Instruments OpAL - Page 96

OpAL Oxford Instruments Plasma Technology System Manual
PROCESS GAS
OUT TO CHAMBER (2)
PROCESS GAS
OUT TO CHAMBER (1)
GAS LINE 1
(IN)
GAS LINE 2
(IN)
GAS LINE 3
(IN)
GAS LINE 4
(IN)
GAS LINE 5
(IN)
GAS LINE 6
(IN)
GAS LINE 7
(IN)
GAS LINE 8
(IN)
COMPRESSED
AIR IN OUT
100MM EXTRACTION
COLLAR
GAS POD COVER
(CUT AWAY TO SHOW
INTERNAL DETAILS)
GAS POD COVER
INTERLOCK MICROSWITCH
GAS POD
CAN PCB
(GAS LINES
1-4)
GAS POD
CAN PCB
(GAS LINES
5-8)
CONTROL
CABLE FROM
PLC / PCB
Fig 3-32: Typical 8-line gas pod
Description
Issue 1: August 07 Page 3-40 of 46 Printed: 07 August 2009 07:42