Comet Synertia RF - Page 10

VIII User Manual Synertia® RF Generator
The information contained in this manual is subject to change by Comet Yxlon without prior notice.
List of tables
Table 1: Abbreviations ........................................................................................................................... 3
Table 2: Special terms ........................................................................................................................... 3
Table 3: SEMI standards ....................................................................................................................... 5
Table 4: EU/EN standards and directives ......................................................................................... 6
Table 5: Values of external circuit breaker ...................................................................................... 12
Table 6: Limiting conditions ................................................................................................................19
Table 7: List of trademarks used in this manual ........................................................................... 22
Table 8: Components on the front panels of air-cooled and water-cooled generators ...... 25
Table 9: Components on the back panel of the air-cooled generator ...................................... 26
Table 10: Components on the back panel of the water-cooled generator ............................. 27
Table 11: Interfaces on the backs of air- and water-cooled generators – Mainboard .......... 28
Table 12: Interfaces on the backs of air- and water-cooled generators – Sync Layer ......... 29
Table 13: Interfaces on the backs of air- and water-cooled generators – Fieldbus Layer ... 29
Table 14: Description of functional blocks of the generator ....................................................... 33
Table 15: Center of mass .................................................................................................................... 35
Table 16: Values of cooling water .................................................................................................... 50
Table 17: Pin-out Han Q connector ................................................................................................... 52
Table 18: Pin-out Han C connector ................................................................................................... 53
Table 19: Operating status ................................................................................................................ 60
Table 20: 15-pin User Port – Configuration .................................................................................... 78
Table 21: 15-pin User Port – Signal specifications ......................................................................... 79
Table 22: 5-pin M8 DC-Supply – Configuration ............................................................................. 84
Table 23: DC-Supply ............................................................................................................................ 85
Table 24: 3-pin M8 Interlock – Configuration ................................................................................. 86
Table 25: Structure of a request ....................................................................................................... 89
Table 26: Structure of a response to a read command .............................................................. 90
Table 27: Structure of a response to an invalid request ...............................................................91
Table 28: Exception Function Codes ................................................................................................ 92
Table 29: Exception Codes ................................................................................................................. 93
Table 30: Example 1 – Structure of the request ............................................................................ 94
Table 31: Example 1 – Structure of the response .......................................................................... 94