Operating Procedures: Patterning
C O N F I D E N T I A L – FEI Limited Rights Data 5-49
• ScanType – the Serpentine means the beam proceeds from left
to right and back from right to left, while the Raster scans from
left to right, then the beam returns to the left starting point
• Fill Style – one can choose either to mill a solid (area) or just a
frame (box and circular types only)
• Passes – a number of the beam scans over the pattern
• Defocus of the beam (WD change) – influences the Total
Diameter and Area Calculation. It allows focusing above /
below (negative / positive value) the sample surface
• Blur – like Defocus, but specifying the (additional) diameter of
the blurred spot
• Interaction Diameter for an infinitely small beam – influences
the Total diameter
• Total Diameter – the combination of the beam diameter and
interaction diameter influences the OverlapX/Y and PitchX/Y
values (read only)
• Maximum Dose per Area – describes the adsorbed gas layer, allowing a certain dose to be deposited at a higher
rate than the saturation current density, allowing a temporary higher rate (actually not used)
•
Saturation Current Density
– the current at which 63% of the saturation sputter rate is reached (actually not used)
• Total Volume Sputter Rate – the speed at which material is removed or deposited (actually not used)
• Selective Milling Enabled / Selective Milling Time Interval / Min Contrast Threshold / Max Contrast Threshold items –
correspond to the Selective Mill tab module elements: Enabled check box / Interval adjuster / left / right border of
the grey level to be processed for the selected pattern
Selective Mill tab Module
It is possible to set a given grey level range to be processed in the
extent of the selected pattern area.
• Scan button – reads the pattern area grey level histogram
Move the vertical black line to a desired grey level position and
also move the red rectangle edges to set the grey level extent.
•
Enabled
check box – when ticked the selective milling is enabled
• Interval adjuster – sets the time [s] after which the histogram is actualised
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