Operating Procedures: Patterning
C O N F I D E N T I A L – FEI Limited Rights Data 5-59
The following figure shows the onscreen view with the stage at 0° tilt, with both the electron and ion beam imaging
views.
FIGURE 5-17 Cross-Section Viewing at 0° Tilt
The following figure shows the onscreen views with the stage still at 0° tilt, but with both stage and ion beam scan
rotation at 180°.
FIGURE 5-18
Cross-Section Viewing at 0° Tilt Rotated 180°
Onscreen views
Ion beam
Cross-section face
(Not to Scale)
Not
visible
Electron beam
Cross-section face
Ion column
Electron column
Cross-section face
0° stage tilt
Stage
Shallow end
Tilted view into shallow
end of cross section
Not
visible
Onscreen views
Ion beam
Cross-section face
(Not to Scale)
Completely
visible
Electron beam
Cross-section face
Tilted view into
cross-section
Not
visible
Ion column
Electron column
Stage
Cross-section face
0° stage tilt, 180° stage rotation
scan rotation 180°
To Next Page
Loading...
