Maintenance: Shutter
C O N F I D E N T I A L – FEI Limited Rights Data 6-5
2. Rotate the black load-base knob counterclockwise so its pole faces down (unlocked position).
3. Place the shutter arm on the load-base.
4. Rotate the knob clockwise so its pole faces left (locked position – shutter arm’s slot is released now).
5. Remove the old aperture.
6. Place new aperture bright side up on the load-base.
7. Use tweezers and carefully push the aperture to the shutter arm slot as far as the stop.
Caution!
Use only minimal force not to deform the aperture!
8. Rotate knob to the unlocked position and while supporting the shutter arm with a finger at marked point (see
figure) carefully remove it vertically from the load-base.
9. Check the aperture holds in the shutter arm by gentle shaking, and also check visually aperture’s axial position.
10. Attach the shutter arm back to the chamber and pump the system.
Check again the aperture position is like at the beginning of procedure. In case it is not at the image screen center,
repeat the exchange procedure.
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