Alignments: E-Column: Supervisor Alignments
C O N F I D E N T I A L – FEI Limited Rights Data4-10
Source Tilt & Shift
This procedure takes from 2 to 3 hours and should be executed when necessary. It centers the electron beam in the
column using three variables:
• DPA (Differential Pumping Aperture – separates high vacuum column part from chamber vacuum) – centers
electron beam to pass through the column without any cutoff.
• Tilt – centers the beam on the optical axis.
• Shift – centers the beam on the center of the final lens.
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