5-8 Keysight B1505A Configuration and Connection Guide
Connection Guide for Wafer Prober and Your Own Test Fixture
Connection Overview
Table 5-4 To Connect N1267A Fast Switch
B1505A terminals Required cables N1267A terminals
MCSMU
Force 16494A Triaxial cable, 3 m or 1.5 m, 1 ea. MCSMU Force
Sense 16494A Triaxial cable, 3 m or 1.5 m, 1 ea. Sense
HCSMU
Force 16493S HCSMU cable, 3 m or 1.5 m, 1 ea. for HCSMU
HCSMU
Force
Sense Sense
HVSMU
Force 16493T HVSMU cable, 3 m or 1.5 m, 1 ea.
HVSMU
GNDU
16493L GNDU cable, 3 m or 1.5 m, 1 ea.
GNDU
N1267A terminals Required cables/Description Connect to
Low
Force Coaxial cable with BNC(m) connector. N1254A-503 can be used. DUT low terminal
(ex: source)
High
Force Coaxial cable with HV(plug) connector. N1254A-506 can be used.
Use coaxial cable to minimize affect of inductance.
DUT high terminal
(ex: drain)
Shielding box
B1505A
DUT interface
N1267A
Interlock circuit
16493T
16493L
Low Force
High Force *2
*1
*3
*1: 1252-1419
*2: N1254A-506 or other cable, 1 ea.
*3: N1254A-503 or other cable, 2 ea.
16493S
16494A
16493J
N1266A
*5
*5: 16494A, 4 ea., 16493L, 16493T, and 16493G
to configure HVMCU.