Keysight B1505A Configuration and Connection Guide 5-9
Connection Guide for Wafer Prober and Your Own Test Fixture
Connection Overview
Table 5-5 To Make UHC Measurement Path
B1505A terminals Required cables N1265A terminals
MCSMU
1
1. HCSMU is substitutable. Then use 16493S HCSMU cable, N1254A-103 adapter for Force, and
N1254A-517 adapter for Sense.
Force 16494A Triaxial cable, 1.5 m, 1 ea. UHC
Input
I Control
Force
Sense 16494A Triaxial cable, 1.5 m, 1 ea. Sense
MCSMU
1
Force 16494A Triaxial cable, 1.5 m, 1 ea. UHC
Input
VControl
Force
Sense 16494A Triaxial cable, 1.5 m, 1 ea. Sense
MCSMU
1
Force 16494A Triaxial cable, 1.5 m, 1 ea. Gate Force
Sense 16494A Triaxial cable, 1.5 m, 1 ea. Sense
GNDU
16493L GNDU cable, 1.5 m, 1 ea. Also see Table 5-2.
GNDU
Digital I/O 16493G Digital I/O cable, 1.5 m, 1 ea. Also see Table 5-2. Digital I/O Input
Terminals Required cables/Description Connect to
Low Force Cable with banana connector. N1254A-523 can be used. DUT low terminal
(ex: source)
2
2. Non-Kelvin connection is not allowed. GNDU Sense is internally connected to Low Sense.
Low Sense Coaxial cable with BNC(m) connector. N1254A-503 can be used.
High Force Cable with banana connector. N1254A-523 can be used. DUT high terminal
(ex: drain)
2
High Sense Triaxial cable with HV(plug) connector. N1254A-505 can be used.
Gate Coaxial cable with BNC(m) connector. N1254A-503 can be used. DUT gate or base
LINE Power cable, 1 ea., for connecting to power line site AC power
Earth Wire, 1 ea., for earthing site ground
B1505A Interlock 16493J Interlock cable, 3 m or 1.5 m, 1 ea., and 1252-1419
Interlock connector, 1 ea.
Interlock circuit
Shielding box
DUT interface
N1254A-524
Interlock circuit
Sense
Force
Low
High
Sense
Force
*2
*1
*2
*3
16493J
N1265A
*1: 1252-1419
*2: N1254A-523
*3: N1254A-506
*4: N1254A-503
*5: 16494A, 6 ea., 16493L, and 16493G
(needs more cables for using HVSMU/HVMCU
or HP/MPSMU through selector of N1265A .)
*5
B1505A
*4
Gate
*4
N1266A
*6
*6: 16494A, 4 ea., 16493L, 16493T, and 16493G to configure HVMCU.