5-28 Keysight B1505A Configuration and Connection Guide
Connection Guide for Wafer Prober and Your Own Test Fixture
To Connect Module Selector
Figure 5-11 To Connect N1258A Module Selector
Figure 5-12 To Connect N1258A Module Selector, with N1261A-002 GNDU Adapter
NOTE Using GNDU Adapter
Generally, the connection of Figure 5-11 is used for the measurement using the module
selector. And the connection of Figure 5-12 is effective for the accurate measurement over
10 mA using the HP/MPSMU or HVSMU.
CAUTION Never connect the HVSMU Force and Guard terminals and the HVMCU High terminal to
any output, including circuit common, chassis ground, or any other measurement resource
such as SMU. Connecting other measurement resource may damage the connected one.
NOTE Do not connect or put any conductor on the HCSMU Low Force and Low Sense terminals,
outer conductor of the coaxial connectors. Connecting or putting conductor of circuit
common, chassis ground, or any potential on causes the measurement error.
HCSMU Force
N1258A Module Selector
HVSMU Force
16493L
HCSMU Sense
HPSMU Force
HPSMU Sense
16493T
High Force
DUT
GNDU
16493S
16493K 1 ea.
or 16494A 2 ea.
High Sense
Low Force
Low Sense
B1505A
HCSMU
Force
HVSMU
GNDU
HPSMU
Force
Sense
Force
Sense
B1505A
HCSMU Force
HCSMU
N1258A Module Selector
HVSMU Force
Force
16493L
HCSMU Sense
HPSMU Force
HPSMU Sense
HVSMU
16493T
High Force
DUT
GNDU
HPSMU
GNDU
Force
Sense
Force
Sense
16493S
16493K 1 ea.
or 16494A 2 ea.
High Sense
Low Force
Low Sense
Force
Sense
N1261A-002
GNDU
Protection Adapter
*1 : N1254A-516, 1 ea. and 16493U-001, 2 ea.
*2 : N1254A-503, or a coaxial cable with BNC(m) connector
*1
*2