Keysight Technologies B1505A Configuration Guide

7-62 Keysight B1505A Configuration and Connection Guide
Connection and Ordering Examples
Configuration Examples for Vertical Device Measurement with Wafer Prober
3 kV, 500 A, High Voltage Medium Current Measurement for
On-Wafer Vertical Device
• Device Type: Vertical MOSFET (3 terminals)
• Key Specification
• Max voltage/current: 3 kV/500 A
• High Voltage Medium Current capability: 2200 V/1.1 A, 1500 V/2.5 A
• Module Selector for multi-parameter automated measurement function
Figure 7-33 3 kV, 500 A, High Voltage Medium Current Measurement for On-wafer Vertical
Device
NOTE Prober vendor is responsible for cabling inside the shielding box.
Table 7-30 Required equipment, accessories, and cables
Model/Option Quantity Description
B1505A 1 Power Device Analyzer/Curve Tracer mainframe
B1513C-FG 1 High Voltage Source Monitor Unit, 3000 V/4 mA (Pulsed & DC)
B1514A-FG 5 Medium Current Source Monitor Unit, 1 A/30 V(Pulsed), 100 mA/30 V(DC)
16493T 1 High Voltage Source Monitor Unit Cable
16493T-001 or
002
1 High Voltage Source Monitor Unit Cable (1.5 m or 3.0 m)
16493L 1 Ground Unit Cable
S
N1266A
HVSMU
GNDU
MCSMU
MCSMU
MCSMU
B1505A
MCSMU
MCSMU
16493J Interlock cable (Included in B1505A)
GNDU
Input Output
Input
HVSMU
Output
High
Output
Low
F
S
F
S
F
S
Vcontrol F
Vcontrol S
Icontrol F
Icontrol S
F
S
F
S
16493G-001 Digital I/O cable (Included in N 1266A)
HV SMU
GN DU
UHC Input
V Control
I Co nt ro l
For Gate
For N 126 5A
For N 126 5A
For Drain
For N 126 6A
For N 126 6A
HF
LF
HS
LS
G
ate
N1265A
Gate
Selector
High
Low
N1254A-524
16493G-001 Digital I/O cable (Included in N1265A)
G
D
(Chuck)
Ga te F
Ga te S
16493T (Included in the HVSMU)
16493T
16493L (Included in B1505A)
16494A (Included in the MCSMU)
16493L
16494A (Included in the MCSMU)

Keysight Technologies B1505A Specifications

General

Brand	Keysight Technologies
Model	B1505A
Category	Measuring Instruments
Language	English