Oxford Instruments OpAL - Page 17

Case
Extension ApplicationNo FilingDate PublicationNo
P
ublication Dat
e
PatentNo Issue DateTitle Status Assgnee
g.015 JP Thin Film Forming Method JP 2001/000503 08-Jun-2001 2003/536272 02-Dec-2003 3687651 17-Jun-2005 ASMGPublished
g.015 US Thin Film Forming Method US 2003/000297 15-Jul-2003 2004/0009307 15-Jan-2004 ASMGPublished
g.015 WO Thin Film Forming Method WO PCT/KR01/0 08-Jun-2001 0199166 27-Dec-2001 ASMGPublished
g.017 EP Plasma Enhanced ALD equipment and
Method of forming a Conducting Thin Film
EP 2001/000957 06-Aug-2001 1421606 26-May-2004 ASMGPublished
g.017 JP Plasma Enhanced ALD equipment and
Method of forming a Conducting Thin Film
JP 06-Aug-2001 2005/502784 27-Jan-2005 ASMGPublished
g.017 KR Plasma Enhanced ALD equipment and
Method of forming a Conducting Thin Film
KR 2001/46802 02-Aug-2001 11-Feb-2003 ASMGPublished
g.017 US Plasma Enhanced ALD equipment and
Method of forming a Conducting Thin Film
US 10/486311 06-Aug-2001 2004/0231799 25-Nov-2004 ASMGPublished
g.017 WO Plasma Enhanced ALD equipment and
Method of forming a Conducting Thin Film
WO PCT/KR01/0 06-Aug-2001 03023835 20-Mar-2003 ASMGPublished
g.018 KR Apparatus for Depositing KR 2001/69598 08-Nov-2001 2003/0038168 16-May-2003 ASMGPublished
g.018 US Apparatus for Depositing US 10/495156 08-Nov-2002 2005/0034664 17-Feb-2005 ASMGPublished
g.018 WO Apparatus for Depositing WO PCT/KR02/0 08-Nov-2002 03041141 15-May-2003 ASMGPublished
g.019 AUS Method for Forming Thin Film US 10/495157 08-Nov-2002 2005/0037154 17-Feb-2005 ASMGPublished
g.019 EP Method for Forming Thin Film EP 2002/000788 08-Nov-2002 1454347 08-Sep-2004 ASMGPublished
g.019 JP Method for Forming Thin Film JP 2003/000543 08-Nov-2002 2005/509093 07-Apr-2005 ASMGPublished
g.019 KR Method for Forming Thin Film KR 2001/69597 08-Nov-2001 3038167 16-May-2003 ASMGPublished
g.019 WO Method for Forming Thin Film WO PCT/KR02/0 08-Nov-2002 03041142 15-May-2003 ASMGPublished
I.052 AUS LPCVD with ALD preconditioning US 09/611602 07-Jul-2000 09-Apr-2003 6592942 15-Jul-2003 ASMIIssued
I.052 DE LPCVD with ALD preconditioning DE 09-Jul-2001 1299572 09-Apr-2003 60104426 21-Jul-2004 ASMIIssued
I.052 EP LPCVD with ALD preconditioning EP 1952051.9 09-Jul-2001 1299572 09-Apr-2003 1299572 21-Jul-2004 ASMIPublished&
Gr
I.052 FR LPCVD with ALD preconditioning FR 09-Jul-2001 1299572 09-Apr-2003 1299572 21-Jul-2004 ASMIIssued
Pa
g
e 2 of 13
S
M Patents Licensed / Sub-licensed to Oxford Instruments
Restricted Distribution
October 14, 2005