Oxford Instruments OpAL - Page 22

Case
Extension ApplicationNo FilingDate PublicationNo
P
ublication Dat
e
PatentNo Issue DateTitle Status Assgnee
MC.024 KR Tungsten nitride KR 10/2002/7004 15-Apr-2002 30-May-2002 ASMIPublished
MC.024 PCT Tungsten nitride WO /FI00/00895 13-Oct-2000 19-Apr-2001 ASMIPublished
MC.024 TW Tungsten nitride TW 89121352 12-Oct-2000 541351 11-Jul-2003 ASMIPublished
MC.025 AUS Selective coating US 09/644636 23-Aug-2000 6391785 21-May-2002 6391785 21-May-2002 ASMIIssued
MC.025 C1 Selective coating (IMEC) US 10/123492 15-Apr-2002 2002/0155722 24-Oct-2002 6664192 16-Dec-2003 ASMIIssued
MC.025 C2US Selective coating (IMEC) US 10/731656 08-Dec-2003 2004/0121616 24-Jun-2004 6852635 08-Feb-2005 ASMIIssued
MC.025 EP Selective coating (IMEC) EP 000955875 24-Aug-2000 1206799 22-May-2002 ASMIPublished
MC.025 JP Selective coating (IMEC) JP 2001/519484 24-Aug-2000 2003/508897 04-Mar-2003 ASMIPublished
MC.025 PCT Selective coating (IMEC) WO /US00/23252 24-Aug-2000 01/15220 01-Mar-2001 ASMIPublished
MC.025 TW Selective coating (IMEC) TW 89117141 24-Aug-2000 478045 01-Mar-2002 151092 30-May-2003 ASMIIssued
MC.027 EP Nitride nanolaminates on sensitive surfaces EP 00973583.8 16-Oct-2000 1221178 10-Jul-2002 ASMIPublished
MC.027 JP Nitride nanolaminates on sensitive surfaces JP 2001/531142 15-Apr-2002 2003/524888 19-Aug-2003 ASMIPublished
MC.027 PCT Nitride nanolaminates on sensitive surfaces WO /US00/28654 16-Oct-2000 01/29893 26-Apr-2001 ASMIPublished
MC.027 TW Nitride nanolaminates on sensitive surfaces TW 89121517 13-Oct-2000 550306 01-Sep-2003 185093 07-Jan-2004 ASMIIssued
MC.027 US Nitride nanolaminates on sensitive surfaces US 10/049125 20-Aug-2002 6902763 07-Jun-2005 ASMIIssued
MC.028 AUS Metals with boron compound US 09/687205 13-Oct-2000 6475276 05-Nov-2002 6475276 05-Nov-2002 ASMIIssued
MC.028 C1US Metals with boron compound (ALD) US 10/210715 30-Jul-2002 2002/0187256 12-Dec-2002 6821889 23-Nov-2004 ASMIIssued
MC.028 FI Metals with boron compound (ALD) FI 19992235 15-Oct-1999 15-Apr-2001 ASMIPublished
MC.029 AUS TMA and O3 US 10/003749 23-Oct-2001 2002/0106451 08-Aug-2002 6743475 01-Jun-2004 ASMIIssued
MC.029 C1 TMA and O3 US 10/829894 21-Apr-2004 2004/0197476 07-Oct-2004 6884465 26-Apr-2005 ASMIIssued
MC.029 JP TMA and O3 JP 2001/324382 23-Oct-2001 2002/161353 04-Jun-2002 ASMIPublished
MC.029 TW TMA and O3 TW 89122263 23-Oct-2000 548239 21-Aug-2003 185773 14-Jan-2004 ASMIIssued
MC.030 AUS Solid source for Pulsar™ US 09/854706 14-May-2001 2001/0042523 22-Nov-2001 6699524 02-Mar-2004 ASMIIssued
Pa
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e 7 of 13
S
M Patents Licensed / Sub-licensed to Oxford Instruments
Restricted Distribution
October 14, 2005