Oxford Instruments OpAL - Page 25

Case
Extension ApplicationNo FilingDate PublicationNo
P
ublication Dat
e
PatentNo Issue DateTitle Status Assgnee
MC.044 TW Graded barriers TW 90105107 06-Mar-2001 11-Jun-2002 157886 14-Sep-2002 ASMIIssued
MC.045 AUS Dual damascene US 09/644416 23-Aug-2000 6727169 27-Apr-2004 6727169 27-Apr-2004 ASMIIssued
MC.045 D1US Dual damascene US 10/737315 15-Dec-2003 2004/0130029 08-Jul-2004 ASMIPublished
MC.045 EP Dual damascene EP 00957751.1 26-Feb-2002 1221177 10-Jul-2002 ASMIPublished
MC.045 PCT Dual damascene WO /US00/23213 24-Aug-2000 0129891 26-Apr-2001 ASMIPublished
MC.045 TW Dual damascene TW 89117142 24-Aug-2000 01-Mar-2002 151592 27-Jun-2002 ASMIIssued
MC.046 AUS Low k US 09/843518 26-Apr-2001 2001/0054769 27-Dec-2001 6482733 19-Nov-2002 ASMIIssued
MC.046 C1US Low k US 10/303355 21-Nov-2002 2003/0134508 17-Jul-2003 6699783 02-Mar-2004 ASMIIssued
MC.046 CP1US Low k US 10/303293 22-Nov-2002 2003/0143839 31-Jul-2003 6759325 06-Jul-2004 ASMIIssued
MC.046 D1US Low k US 10/237526 06-Sep-2002 2003/0054631 20-Mar-2003 6686271 03-Feb-2004 ASMIIssued
MC.046 JP Low k JP 2001/144436 15-May-2001 2002/9078 11-Jan-2002 ASMIPublished
MC.046 WO Low k PCT PCT/US/03/4 22-Nov-2003 04049432 10-Jun-2004 ASMIPublished
MC.047 AUS Shallow trench US 09/887199 21-Jun-2001 2003/0015764 23-Jan-2003 6861334 01-Mar-2005 ASMIIssued
MC.048 AUS Capacitor dielectrics US 09/452844 03-Dec-1999 6780704 24-Aug-2004 ASMIIssued
MC.048 D1US Capacitor dielectrics US 09/791072 22-Feb-2001 2001/0024387 27-Sep-2001 6831315 14-Dec-2004 ASMIIssued
MC.048 JP Capacitor dielectrics JP 2000/368569 04-Dec-2000 24-Jul-2001 ASMIPublished
MC.048 TW Capacitor dielectrics TW 89125655 01-Dec-2000 11-May-2002 155059 27-Aug-2002 ASMIIssued
MC.049 AUS Oxidation moderation US 09/791167 22-Feb-2001 2001/0031562 18-Oct-2001 6492283 10-Dec-2002 ASMIIssued
MC.049 C1US Oxidation moderation US 10/281418 25-Oct-2002 2003/0060057 27-Mar-2003 6794314 21-Sep-2004 ASMIIssued
MC.050 AUS Metal oxide reduction US 10/276663 15-Nov-2002 2004/0038529 26-Feb-2004 6921712 26-Jul-2005 ASMIIssued
MC.050 EP Metal oxide reduction EP 01934057.9 20-Sep-2002 1282911 12-Feb-2003 ASMIPublished
MC.050 JP Metal oxide reduction JP 2001/584473 15-Nov-2002 2003/533880 11-Nov-2003 ASMIPublished
MC.050 KR Metal oxide reduction KR 10/2002/7015 13-Nov-2002 2003/7612 23-Jan-2003 ASMIPublished
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S
M Patents Licensed / Sub-licensed to Oxford Instruments
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October 14, 2005