Oxford Instruments OpAL - Page 24

Case
Extension ApplicationNo FilingDate PublicationNo
P
ublication Dat
e
PatentNo Issue DateTitle Status Assgnee
MC.037 EP CuO reduction / plasma radicals EP 00922268.8 14-Apr-2000 1183406 06-Mar-2002 ASMIPublished
MC.037 JP CuO reduction / plasma radicals JP 2000/610879 12-Oct-2001 2002541332 03-Dec-2002 ASMIPublished
MC.037 PCT CuO reduction / plasma radicals WO /US00/10267 14-Apr-2000 0061833 19-Oct-2000 ASMIPublished
MC.038 AUS Licenced Sherman patent US 08/699002 16-Aug-1996 29-Jun-1999 5916365 29-Jun-1999 ASMIIssued
MC.039 EP Conductance ratio EP 19581099 18-Nov-2002 1322797 02-Jul-2003 ASMIPublished
MC.039 JP Conductance ratio JP 2002/513966 20-Jul-2001 2004/504497 12-Feb-2004 ASMIPublished
MC.039 KR Conductance ratio KR 10/2003/7000 20-Jul-2001 2003/24787 26-Mar-2003 ASMIPublished
MC.039 PCT Conductance ratio WO /FI01/00680 20-Jul-2001 0208488 31-Jan-2002 ASMIPublished
MC.039 TW Conductance ratio TW 90117837 20-Jul-2001 576874 21-Feb-2004 197452 17-Jun-2004 ASMIIssued
MC.039 US Conductance ratio US 10/333521 20-Jul-2001 2003/0224107 04-Dec-2003 6881263 19-Apr-2005 ASMIIssued
MC.043 AUS Sullivan ALE-reactor (radicals and purging) US 09/392371 08-Sep-1999 6511539 28-Jan-2003 6511539 28-Jan-2003 ASMAIssued
MC.043 C1US Sullivan ALE-reactor (radicals and purging) US 10/317275 10-Dec-2002 2003/0089308 15-May-2003 6764546 20-Jul-2004 ASMAIssued
MC.043 D1US Sullivan ALE-reactor (radicals and purging) US 10/317266 10-Dec-2002 2003/0101927 05-Jun-2003 ASMAPublished
MC.043 EP Sullivan ALE-reactor (radicals and purging) EP 00963326.4 08-Sep-2002 1216106 26-Jun-2002 ASMAPublished
MC.043 JP Sullivan ALE-reactor (radicals and purging) JP 2001/521471 07-Mar-2002 2003/508932 04-Mar-2003 ASMAPublished
MC.043 PCT Sullivan ALE-reactor (radicals and purging) WO /US00/24586 08-Sep-2000 0117692 15-Mar-2001 ASMAPublished
MC.043 TW Sullivan ALE-reactor (radicals and purging) TW 89118222 06-Sep-2000 527224 11-Apr-2003 175152 29-Jul-2003 ASMAIssued
MC.044 AUS Graded barriers US 09/800757 06-Mar-2001 2001/0041250 15-Nov-2001 6534395 18-Mar-2003 ASMIIssued
MC.044 C1US Graded barriers US 10/253859 23-Sep-2002 2003/0032281 13-Feb-2003 6933225 23-Aug-2005 ASMIIssued
MC.044 D1US Graded barriers US 10/329658 23-Dec-2002 2003/0129826 10-Jul-2003 6703708 09-Mar-2004 ASMIIssued
MC.044 EP Graded barriers EP 01918295.5 02-Mar-2001 1266054 18-Dec-2002 ASMIPublished
MC.044 JP Graded barriers JP 2001/565432 02-Mar-2001 2003/526218 02-Sep-2003 ASMIPublished
MC.044 PCT Graded barriers WO /US01/06746 02-Mar-2001 0166832 13-Sep-2001 ASMIPublished
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S
M Patents Licensed / Sub-licensed to Oxford Instruments
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October 14, 2005