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1) Pump out bubbler line; see Fig 3-3.
2) Turn on D1 (S1 is paired with D1), so that atmosphere trapped during installation is
pumped out from the outlet.
3) Do not turn on the outlet manual valve yet!
To chamber
Heated TEMAH pot pre-
fitted with manual valves.
Single
ALD valve
jacket heated
to 200 °C
Drip tray
Extraction port
1 m
3
/h
Precursor cabinetN
2
purge
Purge
Dose
Bypass
Ar purge
500 sccm
Manual valve
Air driven nupro valve –manual control
Fast high temperature ALD valve
Fig 3-4: Step 3 (Pot preparation for vapour draw)
Precursor Source Pot
Printed: 7-Oct-07, 12:13 Page 15 of 20 Issue 1: September 07
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