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1) Remove VCR blanks.; see Fig 3-3.
2) Connect outlet only to the source pot.
3) Do not turn on the outlet manual valve yet!
To chamber
Heated TEMAH pot pre-
fitted with manual valves.
Single
ALD valve
jacket heated
to 200 °C
Drip tray
Extraction port
1 m
3
/h
Precursor cabinetN
2
purge
Purge
Dose
Bypass
Ar purge
500 sccm
Manual valve
Air driven nupro valve –manual control
Fast high temperature ALD valve
Fig 3-3: Step 2 (Pot preparation for vapour draw)
Precursor Source Pot
Issue 1: September 07 Page 14 of 20 Printed: 7-Oct-07, 12:13
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