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1) Ensure that lines are fitted with VCR blanks.; see Fig 3-2.
2) Carry out leak check of inlet and outlet.
To chamber
Heated TEMAH pot pre-
fitted with manual valves.
Single
ALD valve
jacket heated
to 200 °C
Drip tray
Extraction port
1 m
3
/h
Precursor cabinetN
2
purge
Purge
Dose
Bypass
Ar purge
500 sccm
Manual valve
Air driven nupro valve –manual control
Fast high temperature ALD valve
E
Fig 3-2: Step 1 (Pot preparation for vapour draw)
Precursor Source Pot
Printed: 7-Oct-07, 12:13 Page 13 of 20 Issue 1: September 07
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