Oxford Instruments OpAL - Page 48

Plasmalab and Ionfab Oxford Instruments Plasma Technology Health and Safety
Health and Safety
Issue 18: April 2010 Page 1-20 of 24 Printed:06 April 2010, 09:32
Label
OIPT Part Number Meaning Location
System vent gas: Nitrogen
Max inlet pressure : 5 Bar
WARNING
Warns of gas type an
maximum pressure
connected to the system
d
,
.
Gas pod.
Gas type: Air (compressed)
Max inlet pressure : 9 Bar
WARNING
Warns of gas type an
maximum pressure
connected to the system
d
,
.
Gas pod.
System process gas :
Max inlet pressure : 5 Bar
WARNING
Warns of gas type an
maximum pressure
connected to the system
d
,
.
Gas pod.
Fluid type: Water (c ooling)
Max inlet pressure : 4.2 Bar
WARNING
Warns of fluid type and
maximum pressure
connected to the system
,
Gas pod.
Caution, refer to
accompanying
documents. ISO 386 4,
No. B.3.1
On (Supply) IEC 417,
No.5007
Off (Supply) IEC 417,
No.5008
Earth (ground) IEC 417
No.5017
,
94-G-G-SUN-ART-
091
f
.
system.
Identifies the location o
electrical safety ground
Power box.
Earth studs
around the
Three phase alternatin
Current IEC 617-2 No
020206
g
.
Three phase alternatin
Current with Neutral wire.
g