Oxford Instruments OpAL - Page 49

Health and Safety Oxford Instruments Plasma Technology Plasmalab and Ionfab
Health and Safety
Printed:06 April 2010, 09:32 Page 1-21 of 24 Issue 18: April 2010
Label
OIPT Part Number Meaning Location
94-G-SUN-ART-052
s
e
94-G-SUN-ART-057
Warns of a hazardou
voltage underneath th
cover.
94-G-SUN-ART-063
eath the cover.
Warns of hazardous
voltage up to 208 V
undern
94-G-SUN-ART-067
eath the cover.
ver.
e
Warns of hazardous
voltage up to 240 V
undern
Turbo pump
controller outer
cover.
Recirculation
chiller controller.
Three phase filter
outer cover.
Vacuum valve
outer cover. RF /
DC generator
outer co
Foreline pump
outer cover.
Power box outer
cover and insid
box.
94-G-SUN-ART-068
eath the cover.
Warns of hazardous
voltage up to 380 V
undern
94-G-SUN-ART-062
eath the cover.
Warns of hazardous
voltage up to 415 V
undern
94-G-SUN-ART-072 h
er. ver.
l
Warns of a hazardous
DC voltage underneat
the cov
700°C table DC
power supply
back co
System interna
panel.
Heater power
cable.
DC magnetron
distribution outer
cover.
DC magnetron
shield cover.
94-G-SUN-ART-074
ent.
Warns that asphyxiant
gas may be pres
Crystal Flex
glove box end
panel.
94-G-SUN-ART-078
Warns of a possible
explosion risk if any
container of water is fitted
to the cabinet.
Precursor cabinet
inside door.