Oxford Instruments OpAL - Page 50

Plasmalab and Ionfab Oxford Instruments Plasma Technology Health and Safety
Health and Safety
Issue 18: April 2010 Page 1-22 of 24 Printed:06 April 2010, 09:32
Label
OIPT Part Number Meaning Location
94-G-SUN-ART-077
f
-
t
cabinet
Warns of the risks o
mixing incompatible pre
cursors.
Precursor cabine
inside and
outside
94-G-SUN-ART-065
f
s
Warns of the risks o
exposure to hazardou
fluids.
Precursor cabinet
exterior panel.
Gas pod outer
door.
94-G-G-SUN-ART-
086
Warns of possible
exposure to hazardous
gases.
Close coupled
gas pod outer
cover
G4-G-SUN-ART-071
.
Warns of the risks
associated with a high
leakage current
Power box mains
cable.
94-G-SUN-ART-064
ssure.
Warns of the risks
associated with fluid
under pre
Gas pod.
System services
panel.
94-G-G-SUN-ART-
088 range.
Warns to stay within fluid
usable temperature
Recirculating
chiller control
panel
94-G-SUN-ART-082 t
y
.
.
Warns of possible
equipment damage tha
could be caused b
unplugging the motor
without turning off the
electrical power supply
PlasmaLab 133
load lock drive
motor enclosure
94-G-SUN-ART-066
he label
is affixed to.
Warns that there is
electrical equipment
mounted on the reverse
of the panel that t
System exterior
panel.