HRX-OM-X037
Contents
HRL Series
Chapter 8 Control, Inspection and Cleaning ................................... 8-1
8.1 Quality Control of Circulating Fluid and Facility Water ......................................... 8-1
8.2 Inspection and Cleaning .......................................................................................... 8-2
8.2.1 Daily check .......................................................................................................................... 8-2
8.2.2 Monthly check ...................................................................................................................... 8-3
8.2.3 Inspection every 3 months................................................................................................... 8-4
8.2.4 Inspection every 6 months................................................................................................... 8-5
8.3 Operation Stop for an Extended Period of Time .................................................... 8-6
8.3.1 Discharge of the circulating fluid ......................................................................................... 8-6
8.3.2 Discharge of the facility water (Water-cooled type) ............................................................. 8-9
8.4 Replacement of consumables ............................................................................... 8-10
8.4.1 Replacing Particle Filters ................................................................................................... 8-10
8.4.2 Replacing the DI filter ........................................................................................................ 8-10
8.4.3 Consumables ..................................................................................................................... 8-13
Chapter 9 Documents ....................................................................... 9-1
9.1 Specifications .......................................................................................................... 9-1
9.1.1 HRL100/200/300-A-40 ....................................................................................................... 9-1
9.1.2 HRL100/200-W-40 ............................................................................................................. 9-3
9.1.3 Refrigerant with GWP reference.......................................................................................... 9-5
9.1.4 Communication specifications ............................................................................................. 9-5
9.2 Dimensions .............................................................................................................. 9-6
9.2.1 HRL100-A-40 ..................................................................................................................... 9-6
9.2.2 HRL200-A-40 ..................................................................................................................... 9-7
9.2.3 HRL300-A-40 ..................................................................................................................... 9-8
9.2.4 HRL100/200-W-40 ............................................................................................................. 9-9
9.3 Flow Diagram ......................................................................................................... 9-10
9.3.1 HRL-A-40- ................................................................................................................ 9-10
9.3.1 HRL-W-40- ............................................................................................................... 9-11
9.4 Cooling Capacity .................................................................................................... 9-12
9.4.1 HRL100‐A‐40 CH1 ........................................................................................................ 9-12
9.4.2 HRL200‐A‐40 CH1 ........................................................................................................ 9-12
9.4.3 HRL300-A-40 CH1 ........................................................................................................ 9-13
9.4.4 HRL100/200/300-A-40 CH2 ........................................................................................... 9-13
9.4.5 HRL100-A-40-T2 CH1 ................................................................................................... 9-14
9.4.6 HRL200-A-40-T2 CH2 .................................................................................................... 9-14
9.4.7 HRL300-A-40-T2 CH1 ................................................................................................... 9-15
9.4.8 HRL100/200/300-A-40-T2 CH2 ...................................................................................... 9-15
9.4.9 HRL300-A-40-T3 CH1 ................................................................................................... 9-16
9.4.10 HRL300-A-40-T3 CH2 .................................................................................................... 9-16
9.4.11 HRL100-W-40 CH1 ....................................................................................................... 9-17
9.4.12 HRL200-W-40 CH1 ........................................................................................................ 9-17
9.4.13 HRL100/200-W-40 CH2 ................................................................................................. 9-18
9.4.14 HRL100-W-40-T2 CH1 .................................................................................................. 9-18