Operating Procedures: Stage Control
C O N F I D E N T I A L – FEI Limited Rights Data 5-37
Align Feature
This utility is designed specifically for long features, extending off the screen
at the magnification required for an observation. It applies the mapping
process bringing the long feature either to the horizontal or vertical stage
axis to make the navigation easier. This can be performed at any point
within the stage field limits and takes into account the stage rotation offset.
Note
Align Feature works best at the eucentric position (see above). Longer distances
result in a greater accuracy.
Caution!
Watch the obstacles significantly extending from the sample plane, as these may interfere with equipment under the
lens.
1. Select a long feature of interest on the sample.
2. Click on the Stage menu / Align Feature.
3. Choose Orientation either Horizontal or Vertical, which relates to the desired final orientation of the feature.
4. Click on the first point along the feature, the Position 1 coordinates update.
5. Moving the mouse updates Position 2 coordinates continuously, by clicking anywhere along the feature they are
stored. The Angle shows value which is used to correct alignment of the feature along the horizontal / vertical
axe. Right-clicking on the imaging area (anywhere) deletes points, enabling to define them again.
6. Drag any point to change its position, if needed. Click on the OK button to finish the setting.
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