System Options: EasyLift
C O N F I D E N T I A L – FEI Limited Rights Data 7-21
Cut free and Lift out
In this procedure, the membrane is cut completely free and lifted out of the sample.
1. Switch to the 1 nA beam current and create rectangle patterns as shown.
2. Select the Si New application file.
3. Mill in Serial mode until it is clear the membrane is free.
Use the SEM iSPI mode to monitor the cutting and to know if it
is cut free.
4. Move the stage down in Z-axis direction. The membrane
should now be hanging from the EasyLift Needle tip and just
over the milled trenches.
5. Move the needle to the Park position.
6. Retract the EasyLift needle.
7. Retract Tungsten or Carbon GIS needle.
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