Software Control: Entering Commands in Summary
C O N F I D E N T I A L – FEI Limited Rights Data 3-57
(Ctrl +) Shift + N starts to mill (previous) next pattern line
Ctrl + O – letter opens Preferences dialog
Ctrl + P opens Print dialog
Shift + P proceeds with next pattern
Ctrl + R restarts scan
Ctrl + (Shift +) S saves image(s) (from all displays)
Ctrl + T toggles electron and ion beams imaging for active display
Ctrl + Y redoes last operation
Ctrl + Z undoes last operation
Ctrl + Shift + Z starts Take Nav-Cam Photo procedure
Pause starts / stops patterning
Ctrl + Pause resets patterning
Ctrl + (Shift +) , sets one step slower (slowest) scanning
Ctrl + (Shift +) . sets one step faster (fastest) scanning
Ctrl + (Shift +) Tab activates displays stepwise (backward)
Ctrl + Page Up / Down switches within Control pages stepwise
Ctrl + 1 / 2 / 3 …
– letter keypad
selects the particular page
(the number corresponds to the page icon sequence)
(Ctrl +) + / - increases / decreases the magnification 2× (Digital Zoom)
* rounds off the magnification / HFW to a nearest round value
Ctrl (+ Alt) + arrow moves the digital zoom area (the pattern)
by one screen pixel in the respective direction
(Shift +) Arrows moves the stage approximately by (40%) 80%
of the field of view in corresponding direction
Table 3-4
Function and Specific Key Short-cuts
Key (+ Key) Function
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