Keysight Technologies B1505A

Keysight B1505A Configuration and Connection Guide
Contents
3 kV, 20 A, Capacitance Measurement for On-Wafer Lateral Device . . . . . . . . . . . . . 7-30
Add High Resolution Measurement (10 fA resolution with MPSMU or HPSMU)
Capability to 3 kV, 20 A, Capacitance Measurement for On-Wafer Lateral Device . . 7-33
3 kV, 40 A Measurement for On-Wafer Lateral Device. . . . . . . . . . . . . . . . . . . . . . . . . 7-35
3 kV, 500 A Measurement for On-Wafer Lateral Device. . . . . . . . . . . . . . . . . . . . . . . . 7-38
3 kV, 500 A, Capacitance Measurement for On-Wafer Lateral Device . . . . . . . . . . . . 7-40
3 kV, 500 A, High Voltage Medium Current Measurement for On-Wafer
Lateral Device . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-42
10 kV, 500 A Measurement for On-Wafer Lateral Device. . . . . . . . . . . . . . . . . . . . . . . 7-44
Configuration Examples for Vertical Device Measurement with Wafer Prober. . . . . . . . 7-46
3 kV, 20 A Measurement for On-Wafer Vertical Device . . . . . . . . . . . . . . . . . . . . . . . . 7-47
3 kV, 20 A, Capacitance Measurement for On-Wafer Vertical Device. . . . . . . . . . . . . 7-51
Add High Resolution Measurement (10 fA resolution with MPSMU or HPSMU)
Capability to 3 kV, 20 A, Capacitance Measurement for On-Wafer Vertical Device. . 7-54
3 kV, 40 A Measurement for On-Wafer Vertical Device . . . . . . . . . . . . . . . . . . . . . . . . 7-56
3 kV, 500 A Measurement for On-Wafer Vertical Device . . . . . . . . . . . . . . . . . . . . . . . 7-59
3 kV, 500 A, Capacitance Measurement for On-Wafer Vertical Device. . . . . . . . . . . . 7-60
3 kV, 500 A, High Voltage Medium Current Measurement for On-Wafer
Vertical Device. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-62
10 kV, 500 A Measurement for On-Wafer Vertical Device . . . . . . . . . . . . . . . . . . . . . . 7-64
GaN Current Collapse / Dynamic On-Resistance Measurement System
using the N1267A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-66
Non-Kelvin Connection with the N1259A Test Fixture for Package Device . . . . . . . . 7-66
Kelvin Connection with the N1259A Test Fixture for Package Device . . . . . . . . . . . . 7-68
Non-Kelvin Connection with Prober for On-Wafer Lateral Device . . . . . . . . . . . . . . . 7-70
Kelvin Connection with Prober for On-Wafer Lateral Device . . . . . . . . . . . . . . . . . . . . 7-72
Upgrading from existing B1505A. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-74
Example of how to upgrade existing B1505A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-76