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Contents
1 Introduction......................................................................................................................................3
1.1 About this guide........................................................................................................................................3
1.2 Health and safety ......................................................................................................................................3
1.3 Terminology...............................................................................................................................................3
2 The clean room.................................................................................................................................4
3 Processes...........................................................................................................................................5
3.1 General.......................................................................................................................................................5
3.2 ALD processes.............................................................................................................................................6
3.2.1 ALD operating parameter ranges...................................................................................................6
3.2.2 ICP operating parameter ranges ....................................................................................................7
3.2.3 Precursors with low vapour pressure .............................................................................................7
3.2.4 Gas calibration factors.....................................................................................................................7
3.2.5 Exhaust emissions ............................................................................................................................7
3.2.6 Premature flaking of chamber wall liners / showerhead material ..............................................8
3.3 Process troubleshooting............................................................................................................................9
3.3.1 Partial process failure......................................................................................................................9
3.3.1.1 Example problems........................................................................................................................9
3.3.1.2 Typical causes................................................................................................................................9
3.3.2 Total plasma failure.........................................................................................................................9
3.3.2.1 Example problems........................................................................................................................9
3.3.2.2 Typical causes................................................................................................................................9
4 Glossary of terms...........................................................................................................................11
5 OIPT locations worldwide..............................................................................................................14
Process Information (Information contained in this document is confidential)
Issue 1: August 07 Page 2 of 14 Printed: 08 October 2007 11:00
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