© Siemens, 2008 SPR2-230.840.01.01.02 SIREMOBIL Iso-C
08.08 CS PS SP
Replacing boards and components 107
Page 107 of 148
For internal use only
NOTE
With present MODULARIS system, the parameters for the
Litho program have to be set again according to the LITHOS-
TAR MODULARIS Service Instructions.
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