Table of Contents xvii
10 Routine Maintenance ........................................................................ 10-1
Maintenance schedule ................................................................................... 10-2
Safety and handling ....................................................................................... 10-3
Rotary pump oil ............................................................................................... 10-4
Oil quality....................................................................................................... 10-4
Oil color .......................................................................................................... 10-4
Gas ballast control......................................................................................... 10-4
Rotary pump maintenance ........................................................................... 10-5
Gas-ballasting the rotary pump.................................................................... 10-5
Checking the rotary pump oil ....................................................................... 10-6
Changing the rotary pump oil....................................................................... 10-7
Replacing the oil mist and odor filter elements ........................................... 10-8
Foreline trap maintenance ......................................................................... 10-11
Reference reservoir maintenance ............................................................. 10-16
EI/CI inner source maintenance ............................................................... 10-18
Cleaning the EI and CI inner sources ........................................................ 10-18
Cleaning the inner source components....................................................... 10-20
Cleaning materials ...................................................................................... 10-20
Ultrasonically cleaning the inner source components............................... 10-21
Cleaning the ion exit plate.......................................................................... 10-22
Cleaning the trap and repeller.................................................................... 10-23
Renewing the filament ................................................................................ 10-32
FI/FD inner source maintenance .............................................................. 10-32
Storing an emitter........................................................................................ 10-32
Changing an emitter.................................................................................... 10-33
EI/CI outer source maintenance ............................................................... 10-35
Cleaning the collimating slits ..................................................................... 10-35
Cleaning the complete outer source............................................................ 10-37
Assembling the ion chamber....................................................................... 10-41
FI/FD outer source maintenance .............................................................. 10-42
Cleaning the extraction rods....................................................................... 10-42
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