11-6 Troubleshooting
The source components have been
incorrectly assembled.
Ensure that the source voltage read-
backs vary with the Tune window
setting. If any of these voltages are
absent, disassemble and correctly
reassemble the source assembly.
Lens settings wrong or atypical. Ensure all Tune window settings are
correct, the readbacks are sensible,
and that all lens parameters affect
the beam.
Analyzer and detector parameters
incorrect.
Ensure the MCP voltage is set
correctly.
See also: Detector maintenance on
page 10-50.
Ensure the parameters in the Tune
window Engineer tab are set to
appropriate values.
See also: The Engineer tab on
page B-39.
Insufficient vacuum:
Possible cause Corrective action
Fore pump not operating. Ensure the pump’s switch is turned
on.
If applicable, rotary pump not oper-
ating correctly.
Gas-ballast the rotary pumps.
Inspect the rotary pump oil. If the oil
is dirty, flush the pump with clean
oil, then refill the pump with new
oil.
See also: Gas-ballasting the rotary
pump on page 10-5.
Unsteady or low intensity peaks (ion beam): (Continued)
Possible cause Corrective action
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