10 Operation Manual
To Check FPD+ Performance (Sample 5188-5245, Japan) 262
Preparation 262
Phosphorus performance 262
Sulfur performance 266
18 Chinese Metrology Testing
FPD+ and ECD Unit Conversion Factors 270
Conversion factors for the FPD+ 270
Conversion factor for the ECD 270
Using the Conversion Factors 272
References 273
19 Glossary