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Spectra Precision Focus 30 - Tilt sensor; Calibration Coarse tilt sensor

Spectra Precision Focus 30
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Chapter 6
Adjustment and Verification
P/N 79000035_SM, Version 1.5 6 - 137 Focus 30/35 Service Manual
Tilt sensor
Calibration Coarse tilt sensor
Calibration Fine tilt sensor
Tools and equipment
Calibration Coarse tilt sensor
Performance
Description Part number
--
Item Performance Action Result Notes
1 Start up instrument /
PASS.
See page 7-3 how to set-
up the instrument.
2 Start the software. Select
Coarse tilt sensor
Zero point
from Final Test
& Report.
3 Edit Coarse tilt
temperature correction
values.
A. Select
Edit
Temperature Values.
B. Type in the values
TempCorrX and
TempCorrY.
C. Press
Save button.
The new
correction
values are stored
in the
instrument
configuration
file.
A data sheet for
constants is delivered
with the service part.

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